SM Heald, JKD Jayanetti, AA Bright and GW Rubloff

Publication year: 1990

X-ray reflectivity study of SiO2 on Si, J. Vac. Sci. Technol. A 8 (3), May/Jun (1990) 2046; SM Heald, JKD Jayanetti, AA Bright and GW Rubloff